Domestic research vacuum equipment creation for strengthening coatings deposition

Y. Panfilov
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Abstract

Intention and tasks of "Vacuum equipment" section in the Ministry of education and science project names "Science device building" formulated. Potential possibilities of domestic companies at foreign vacuum equipment and complete sets change analysed.
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国内研究真空强化镀膜设备的研制
“真空设备”部分的意图和任务是在教育部科技部项目名称“科学装置建设”中制定的。分析了国内企业对国外真空设备及成套设备变化的潜在可能性。
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