Shun Liu, P. Zhu, Zhecong Lin, Yabin Zhou, M. Soto
{"title":"Real-time warpage deformation monitoring using distributed optical fiber sensing","authors":"Shun Liu, P. Zhu, Zhecong Lin, Yabin Zhou, M. Soto","doi":"10.1117/12.2668453","DOIUrl":null,"url":null,"abstract":"The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.","PeriodicalId":227067,"journal":{"name":"International Conference on Precision Instruments and Optical Engineering","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Precision Instruments and Optical Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2668453","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.
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