Investigations into the use of SU-8 in the fabrication of a micro-optical bench for hybrid optoelectronic integration and packaging

Abstract

The ultrathick negative photoresist SU-8 has been investigated for use in the fabrication of a passively aligning micro-optical suite including elements such as fibre alignment grooves, lens holders and device alignment features. The possibility for the fabrication of mirrors is also considered. The excellent micromachining properties of SU-8 using common low-cost, fast photolithographical techniques with processing temperatures of below 100/spl deg/C make it an ideal material for the rapid, cost-effective prototyping of the above structures. A fibre-lens alignment structure has been fabricated and its accuracy evaluated.