{"title":"Polyacrylate tunable microlens with on-chip thermopneumatic actuation","authors":"Wei Zhang, H. Zappe, Andreas Seifert","doi":"10.1109/OMEMS.2012.6318800","DOIUrl":null,"url":null,"abstract":"We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318800","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
