C. Hsu, Wen-Chien Chen, Tsung-Lin Tang, M. Yip, W. Fang
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引用次数: 2
Abstract
A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force.
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