Optimal Design and Implementation of 3D Shape Restoration System for Femtosecond Laser Micromachining

Abstract

In this paper, we propose a 3D shape restoration system which measures height and surface of transparent ITO glass to compensate for focal length and incidence angle of laser beam to femtosecond laser micromachining. The proposed system is composed of line laser, high resolution camera, linear motion guide synchronized to image capturing and control station. To optimize positions of components, we define sensitivity index that represents the effect between measurement error and the position of a camera and line laser. The results of the proposed system are verified by comparing with the results of SPM (scanning probe microscope) and prove the usefulness of the system.