Mid spatial frequency error prevention strategies for the grinding process

M. Pohl, R. Boerret, Olga Kukso, R. Rascher
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Abstract

This research is focused on the link between manufacturing parameters and the resulting mid-spatial frequency error in the manufacturing process of precision optics. The goal is to understand the generation mechanisms of mid-spatial frequency errors and avoid their appearance in the manufacturing process. Also, a simulation which is able to predict the resulting mid spatial frequency error from a manufacturing process is desired.
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磨削过程中频误差预防策略
研究了精密光学元件制造过程中制造参数与中频误差之间的关系。目标是了解中空间频率误差的产生机制,并避免它们在制造过程中出现。此外,还需要能够预测制造过程中产生的中频误差的仿真。
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