{"title":"Yield optimization of multilayer optical coating by modeling of the monitoring process","authors":"G. Muscalu","doi":"10.1117/12.312732","DOIUrl":null,"url":null,"abstract":"In this paper, one investigated the yield of some optical coatings with a nonquarterwave structure within the classical vacuum systems by modeling of the monitoring process. The correlation of the synthesis and modeling process, allows to set the optimum monitoring process for different types of coatings. The experimental results tested on antireflection coatings are according to the theoretical ones.","PeriodicalId":383583,"journal":{"name":"ROMOPTO International Conference on Micro- to Nano- Photonics III","volume":"3405 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ROMOPTO International Conference on Micro- to Nano- Photonics III","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.312732","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, one investigated the yield of some optical coatings with a nonquarterwave structure within the classical vacuum systems by modeling of the monitoring process. The correlation of the synthesis and modeling process, allows to set the optimum monitoring process for different types of coatings. The experimental results tested on antireflection coatings are according to the theoretical ones.
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