Lossless Compression of Rotated Maskless Lithography Images

S. T. Klein, Dana Shapira, Gal Shelef
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引用次数: 1

Abstract

A new lossless image compression algorithm is presented, aimed at mask less lithography systems with mostly right-angled regular structures. Since these images appear often in slightly rotated form, an algorithm dealing with this special case is suggested, which improves performance relative to the state of the art alternatives.
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旋转无掩模光刻图像的无损压缩
针对多为直角规则结构的无掩模光刻系统,提出了一种新的无损图像压缩算法。由于这些图像经常以轻微旋转的形式出现,因此建议使用一种处理这种特殊情况的算法,相对于最先进的替代方案,它可以提高性能。
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