Excitation Temperature Measurements of a Pulse-Operated Argon Microwave-Induced Plasma

M. Mohamed, T. Uchida, D. Coleman, S. Minami
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引用次数: 3

Abstract

The present study reports time-and spatially-dependent emission intensities and corresponding excitation temperatures for a pulse-operated argon microwave-induced plasma. These measurements were made at a variety operating conditions. Excitation temperatures were determined using argon, copper, and iron as thermometric species. Observed temperatures show significant differences with respect to each other. Argon emission lines exhibit a pronounced afterglow enhancement which is not observed for analytical lines. The relation-ship between excitation temperature and afterglow enhancement was studied. Excitation temperature was found to decrease suddenly at the falling edge of the microwave pulse.
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脉冲氩微波等离子体的激发温度测量
本研究报道了脉冲氩微波等离子体的发射强度和相应的激发温度随时间和空间的变化。这些测量是在各种操作条件下进行的。激发温度是用氩、铜和铁作为测温物质来测定的。观测到的温度彼此之间有显著的差异。氩发射谱线表现出明显的余辉增强,这在分析谱线中没有观察到。研究了激发温度与余辉增强的关系。在微波脉冲下降沿处,激发温度突然下降。
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