{"title":"Creation of the Database for Preliminary Calibration System","authors":"A. S. Korolyova, E. S. Pjankov","doi":"10.1109/SIBEDM.2006.231664","DOIUrl":null,"url":null,"abstract":"Calibration of models is a necessary and integral process in modeling of IC manufacturing techniques. In this work the selection, research and analysis of information which is to be considered during the performance of modeling have been carried out and the technique of preliminary calibration is developed","PeriodicalId":151587,"journal":{"name":"International Workshops and Tutorials on Electron Devices and Materials","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Workshops and Tutorials on Electron Devices and Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIBEDM.2006.231664","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Calibration of models is a necessary and integral process in modeling of IC manufacturing techniques. In this work the selection, research and analysis of information which is to be considered during the performance of modeling have been carried out and the technique of preliminary calibration is developed
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