Pingping Jia, Hong Zhao, Yuwei Qin, Meiqi Fang, Xiaopeng Guo
{"title":"Non-destructive rapid inspection methods for spatial light modulator using swept source optical coherence tomography","authors":"Pingping Jia, Hong Zhao, Yuwei Qin, Meiqi Fang, Xiaopeng Guo","doi":"10.1117/12.2512097","DOIUrl":null,"url":null,"abstract":"A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15μm and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"80 4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Precision Engineering Measurement and Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2512097","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15μm and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.
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