M. Banciu, D. C. Geambasu, L. Nedelcu, A. Iuga, C. Chirila, L. Hrib, L. Trupina, T. Furuya, M. Tani, D. Pantelica, M. Dracea, P. Ionescu
{"title":"Millimeter Wave and Terahertz Investigations on Some Dielectric Materials","authors":"M. Banciu, D. C. Geambasu, L. Nedelcu, A. Iuga, C. Chirila, L. Hrib, L. Trupina, T. Furuya, M. Tani, D. Pantelica, M. Dracea, P. Ionescu","doi":"10.1109/SMICND.2018.8539814","DOIUrl":null,"url":null,"abstract":"Investigations of barium strontium titanate (BST) layers deposited on MgO and Si substrates are presented. Since the Sr content determines the dielectric and optical properties of the BST layers at room temperature, accurate compositional analysis was performed by using Rutherford Backscattering technique at 3.041 Mev.","PeriodicalId":247062,"journal":{"name":"2018 International Semiconductor Conference (CAS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2018.8539814","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Investigations of barium strontium titanate (BST) layers deposited on MgO and Si substrates are presented. Since the Sr content determines the dielectric and optical properties of the BST layers at room temperature, accurate compositional analysis was performed by using Rutherford Backscattering technique at 3.041 Mev.
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