{"title":"Optical properties of uniform and nanostructured TiN thin films","authors":"Y. Jen, Ming-Zheng Li, Zheng-Xing Li, M. Lin","doi":"10.1364/OIC.2019.TA.8","DOIUrl":null,"url":null,"abstract":"TiN thin films and nanorod array are grown in magnetron sputtering system. The tailored permittivity via changing the nitrogen flow rate is reported. The polarization dependent plasmonic modes are investigated by analyzing the absorptance spectra.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.TA.8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
TiN thin films and nanorod array are grown in magnetron sputtering system. The tailored permittivity via changing the nitrogen flow rate is reported. The polarization dependent plasmonic modes are investigated by analyzing the absorptance spectra.
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