Optical Surfaces Processing Methods

I. Nikolov, D. Stancheva
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Abstract

A mathematical model for polishing solid crystal surfaces is proposed. Method of wafes processing is offered. A suitable method and control device for surfaces on the processing machine is presented. The use of electronic–beam technologies and magnetic fluid polishing of optical surfaces is recommended. Analysis of the experimental results is done and the state of processed optical surfaces is investigated.
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光学表面加工方法
提出了固体晶体表面抛光的数学模型。提出了一种处理水波的方法。提出了一种适合加工机床表面的方法和控制装置。建议使用电子束技术和磁流体抛光光学表面。对实验结果进行了分析,并对加工后的光学表面状态进行了研究。
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Defocus Measurement Using A Liquid Crystal Point Diffraction Interferometer Aberration Measurement Using Axial Intensity Polished Substrate Surface and Cleaning Study for Coated Optic Quality* Zerodur Polishing Process for High Surface Quality and High Efficiency* Surface Evaluation Techniques for the Optics of the Future
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