{"title":"Development of high-frequency bulk acoustic wave (BAW) resonators as biosensors and bioactuators","authors":"X. Duan, S. Pan, W. Pang","doi":"10.1109/IEDM.2017.8268362","DOIUrl":null,"url":null,"abstract":"Using of bulk acoustic wave resonators for biosensing applications grows rapidly in recent years. In this review, we summarized the recent trend developing of these devices for biodetection from two aspects: 1) as biosensors to provide label-free measurement of biomarkers. 2) as bioacutuators to manipulate biomolecules and enhance biosensing performance.","PeriodicalId":412333,"journal":{"name":"2017 IEEE International Electron Devices Meeting (IEDM)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE International Electron Devices Meeting (IEDM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2017.8268362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Using of bulk acoustic wave resonators for biosensing applications grows rapidly in recent years. In this review, we summarized the recent trend developing of these devices for biodetection from two aspects: 1) as biosensors to provide label-free measurement of biomarkers. 2) as bioacutuators to manipulate biomolecules and enhance biosensing performance.
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