{"title":"Evaluation of Photosensitive Performance of Different Structured UTBB MOSFET","authors":"Liqiao Liu, Xiaoyan Liu, G. Du","doi":"10.23919/SNW.2019.8782896","DOIUrl":null,"url":null,"abstract":"This paper provided a photosensitive performance evaluation of UTBB MOSFET with different structures. The UTBB MOSFET can achieve photosensitive function by integrating a doping well or photodiode under the BOX. With doping well under the BOX, the UTBB MOSFET is more sensitive to light. On the other hand, the saturation exposure time of UTBB with photodiode is longer.","PeriodicalId":170513,"journal":{"name":"2019 Silicon Nanoelectronics Workshop (SNW)","volume":"81 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 Silicon Nanoelectronics Workshop (SNW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/SNW.2019.8782896","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper provided a photosensitive performance evaluation of UTBB MOSFET with different structures. The UTBB MOSFET can achieve photosensitive function by integrating a doping well or photodiode under the BOX. With doping well under the BOX, the UTBB MOSFET is more sensitive to light. On the other hand, the saturation exposure time of UTBB with photodiode is longer.
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