The influences of vacuum pressure and gas components on the stability of GaAs photocathode

Long Wang, F. Shi, Hongchang Cheng, Sen Niu, Honglin Shi, Lei Yan, Xing Cheng, Yuan Yuan
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引用次数: 3

Abstract

The photocurrent attenuation of GaAs photocathode within one hour after activation under three different vacuum pressure (5×10-9Pa, 5×10-8Pa, 5×10-7Pa) were recorded by automatically activated monitor. The results show that: the photocurrent quickly descend in the beginning and then descend linearly at a low slope; the amplitude of the quickly descending area were 10%, 14.74% and 36%separately, with the respective slope of the linear descending area were -0.00653, -0.01132and -0.02. Three samples’ gas components of H2, CH4, CO, H2O, O2, CO2 etc under the same vacuum pressure (5×10-8Pa)during photocurrent attenuation were collected by quadrupole mass spectrometer. By comparing the gas components content and the attenuation law of the photocurrent, it has been found that H2O and H2 had a greater impact on the stability of GaAs photocathode in the ultra-high vacuum environment and H2O was the predominant effect. This paper has important guiding significance and reference value in studying the stability of GaAs photocathode and the improvement of semiconductor photocathode process.
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真空压力和气体组分对GaAs光电阴极稳定性的影响
利用自动激活监测仪记录了三种不同真空压力(5×10-9Pa, 5×10-8Pa, 5×10-7Pa)下活化后1小时内砷化镓光电阴极的光电流衰减。结果表明:光电流在开始时迅速下降,然后以较低的斜率线性下降;快速下降区的幅度分别为10%、14.74%和36%,线性下降区的斜率分别为-0.00653、-0.01132和-0.02。采用四极杆质谱仪采集了光电流衰减过程中相同真空压力(5×10-8Pa)下3种样品的气体组分H2、CH4、CO、H2O、O2、CO2等。通过对比气体组分含量和光电流衰减规律,发现H2O和H2对超高真空环境下GaAs光电阴极稳定性的影响较大,H2O为主导作用。本文对研究砷化镓光电阴极的稳定性和改进半导体光电阴极工艺具有重要的指导意义和参考价值。
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