{"title":"Fabrication of subwavelength grating based optical nano-hairs using ALD nano-patterning","authors":"I. Srimathi, W. Delaney, E. Johnson","doi":"10.1109/IPCON.2015.7323679","DOIUrl":null,"url":null,"abstract":"This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.","PeriodicalId":375462,"journal":{"name":"2015 IEEE Photonics Conference (IPC)","volume":"142 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Photonics Conference (IPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPCON.2015.7323679","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.
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