A modeling approach to include mechanical microsystem components into the system simulation

Abstract

For MEMS devices modern technologies are used to integrate very complex components and subsystems closely together. Due to mixed-domain problems as well as the occurring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analysed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.