{"title":"Ion beam assisted deposition of nitrogen-containing chromium films: A comparison of argon vs nitrogen ions?","authors":"W. Ensinger, M. Kiuchi","doi":"10.1016/J.ENDEND.2009.03.118","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":424132,"journal":{"name":"Journal of End-to-end-testing","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of End-to-end-testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/J.ENDEND.2009.03.118","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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