J. Kim, Yang Liu, N. Scianmarello, P. Satsanarukkit, Y. Tai
{"title":"Ice Fishing Micro channels with sub-micron pores","authors":"J. Kim, Yang Liu, N. Scianmarello, P. Satsanarukkit, Y. Tai","doi":"10.1109/NEMS.2013.6559909","DOIUrl":null,"url":null,"abstract":"We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The control of the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing the Parylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young's pressure induced by the surface tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2013.6559909","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The control of the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing the Parylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young's pressure induced by the surface tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.