Suspended graphene applications in NEMS and MEMS

Abstract

Graphene is a wonderful material with outstanding properties which is ideal for micro-electro-mechanical systems (MEMS) and also nano-electro-mechanical systems (NEMS) like sensors and switches including strain gauges, mass and force sensors. Graphene is single atom thick layer of graphite which consists of carbon atoms that are bonded together in a hexagonal honeycomb lattice. A way of fabricating suspended graphene is presented. Graphene grown on copper (Cu) foil using chemical vapour deposition (CVD) method is used for transference on silicon wafer with etched holes on top. Graphene is transferred on the silicon using Poly (methyl methacrylate) (PMMA) method and the analysis is done using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The suspended graphene is quite uniform and the results show that it is a promising approach for suspended graphene, however, considerable effort is needed for the development of the transference and fabrication process.