{"title":"Design and simulation of a resonance-based MEMS viscosity sensor","authors":"Deeksha Shridhar Vishnampet, Sujan Yenuganti, Sankalp Paliwal, Mythili Peparthi, Kavitha Panneerselvam","doi":"10.1007/s10825-023-02114-9","DOIUrl":null,"url":null,"abstract":"<p>The paper presents the design and simulation of a MEMS-based resonant viscosity sensor using a piezoelectric micro diaphragm. The sensor comprises a vibrating diaphragm as a resonating element with piezoelectric excitation and detection. As the viscosity of the liquid beneath the diaphragm changes, the resonant frequency also changes. A numerical model of a diaphragm is designed in the COMSOL Multiphysics FEM tool, and its resonance characteristics were studied with a fluid of different viscosities beneath it. To support the numerical simulation results, mesoscale experimentation was also performed using a stainless steel thin sheet as a diaphragm and also to verify the proof of concept of the proposed sensor. The major benefit of the proposed sensor is that it uses the resonance measurement principle and can be shown to offer good stable performance, resolution, reliability, and response time. The proposed sensor can also be showcased as a hand-held laboratory product for quick viscosity measurements.</p>","PeriodicalId":620,"journal":{"name":"Journal of Computational Electronics","volume":null,"pages":null},"PeriodicalIF":2.2000,"publicationDate":"2023-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Computational Electronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/s10825-023-02114-9","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
The paper presents the design and simulation of a MEMS-based resonant viscosity sensor using a piezoelectric micro diaphragm. The sensor comprises a vibrating diaphragm as a resonating element with piezoelectric excitation and detection. As the viscosity of the liquid beneath the diaphragm changes, the resonant frequency also changes. A numerical model of a diaphragm is designed in the COMSOL Multiphysics FEM tool, and its resonance characteristics were studied with a fluid of different viscosities beneath it. To support the numerical simulation results, mesoscale experimentation was also performed using a stainless steel thin sheet as a diaphragm and also to verify the proof of concept of the proposed sensor. The major benefit of the proposed sensor is that it uses the resonance measurement principle and can be shown to offer good stable performance, resolution, reliability, and response time. The proposed sensor can also be showcased as a hand-held laboratory product for quick viscosity measurements.
期刊介绍:
he Journal of Computational Electronics brings together research on all aspects of modeling and simulation of modern electronics. This includes optical, electronic, mechanical, and quantum mechanical aspects, as well as research on the underlying mathematical algorithms and computational details. The related areas of energy conversion/storage and of molecular and biological systems, in which the thrust is on the charge transport, electronic, mechanical, and optical properties, are also covered.
In particular, we encourage manuscripts dealing with device simulation; with optical and optoelectronic systems and photonics; with energy storage (e.g. batteries, fuel cells) and harvesting (e.g. photovoltaic), with simulation of circuits, VLSI layout, logic and architecture (based on, for example, CMOS devices, quantum-cellular automata, QBITs, or single-electron transistors); with electromagnetic simulations (such as microwave electronics and components); or with molecular and biological systems. However, in all these cases, the submitted manuscripts should explicitly address the electronic properties of the relevant systems, materials, or devices and/or present novel contributions to the physical models, computational strategies, or numerical algorithms.