Analysis of copper metal with a K-Alpha instrument from Thermo Scientific by XPS at 60 and 200 eV pass energy

IF 1.6 Q3 PHYSICS, CONDENSED MATTER Surface Science Spectra Pub Date : 2023-12-01 DOI:10.1116/6.0002958

Annika M. Dean, Samira Jafari, M. Linford

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Abstract

Copper metal was analyzed by x-ray photoelectron spectroscopy (XPS) using a K-Alpha instrument from Thermo Scientific that employed an Al K-alpha x-ray source (1486.6 eV). The sample was the copper standard on the instrument sample stage that was sputtered with Ar+ to remove its oxide layer and hydrocarbon contamination. Shown in this work are the survey spectrum and high-resolution Cu 2p, Cu L3M45M45, Cu 3s, Cu 3p, O 1s, C 1s, and Ar 2p narrow scans. Narrow and survey scans were collected at 60 and 200 eV pass energy, respectively.

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使用 Thermo Scientific 公司的 K-Alpha 仪器，在 60 和 200 eV 的通过能量下通过 XPS 分析金属铜

利用 Thermo Scientific 公司的 K-Alpha 仪器，采用 Al K-α X 射线源（1486.6 eV），通过 X 射线光电子能谱 (XPS) 分析金属铜。样品是仪器样品台上的铜标准样品，用 Ar+ 进行溅射以去除其氧化层和碳氢化合物污染。本研究中显示的是勘测光谱和高分辨率 Cu 2p、Cu L3M45M45、Cu 3s、Cu 3p、O 1s、C 1s 和 Ar 2p 窄扫描。窄扫描和勘测扫描分别在 60 和 200 eV 的通过能量下采集。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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