{"title":"Preparation of Aluminum-Based Porous Al2O3 Humidity-Sensitive Thin Film Sensors by Microarc Oxidation","authors":"Junqing Xing, Meiqi Xu, Kangcai Xu, Chengtao Yang","doi":"10.1080/10584587.2023.2296321","DOIUrl":null,"url":null,"abstract":"In order to improve the stability, and sensitivity and response speed of moisture-sensitive sensors, the microarc oxidation process is used to realize the preparation of porous Al2O3 structure humi...","PeriodicalId":13686,"journal":{"name":"Integrated Ferroelectrics","volume":"11 1","pages":""},"PeriodicalIF":0.7000,"publicationDate":"2024-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Integrated Ferroelectrics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/10584587.2023.2296321","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
In order to improve the stability, and sensitivity and response speed of moisture-sensitive sensors, the microarc oxidation process is used to realize the preparation of porous Al2O3 structure humi...
期刊介绍：
Integrated Ferroelectrics provides an international, interdisciplinary forum for electronic engineers and physicists as well as process and systems engineers, ceramicists, and chemists who are involved in research, design, development, manufacturing and utilization of integrated ferroelectric devices. Such devices unite ferroelectric films and semiconductor integrated circuit chips. The result is a new family of electronic devices, which combine the unique nonvolatile memory, pyroelectric, piezoelectric, photorefractive, radiation-hard, acoustic and/or dielectric properties of ferroelectric materials with the dynamic memory, logic and/or amplification properties and miniaturization and low-cost advantages of semiconductor i.c. technology.
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