Toshiki Kumagai, K. Tomita, Kenichi Hibino, Katsumi Wasaki
{"title":"「フィゾー型機械式位相シフト干渉計による高開口数レンズの高精度測定技術の開発」にまつわる話","authors":"Toshiki Kumagai, K. Tomita, Kenichi Hibino, Katsumi Wasaki","doi":"10.2493/jjspe.90.182","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":39804,"journal":{"name":"Journal of the Japan Society for Precision Engineering","volume":"14 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Japan Society for Precision Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2493/jjspe.90.182","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Engineering","Score":null,"Total":0}