High Resolution Quadrupole Mass Spectrometer for Ion Beam Processing

Abstract

The mass filtering equipment in the ion beam processing industry plays a vital role. Mass filtering is usually achieved through classic magnetic mass selector techniques. The drawbacks of these techniques are the dimensions, weight, price, and power consumption. We suggest mitigating it by using the electrostatic RF mass selector instead of the magnetic one. We discuss the development of a novel ion beam processing apparatus that employs a QMS filter in a vacuum of superior purity. We describe the experimental setup in terms of part design. The article presents the successful test results of that parts. The article also explains in detail the basic principles and the technical realization of the whole apparatus and presents experimental data showing its high capabilities.