Super-Resolution Imaging of Sub-diffraction-Limited Pattern with Superlens Based on Deep Learning

IF 1.9 4区 工程技术 Q2 Engineering International Journal of Precision Engineering and Manufacturing Pub Date : 2024-05-30 DOI:10.1007/s12541-024-00991-z
Yizhao Guan, Shuzo Masui, Shotaro Kadoya, Masaki Michihhata, Satoru Takahashi
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Abstract

The development of super-resolution imaging techniques has revolutionized our ability to study the nano-scale world, where objects are often smaller than the diffraction limit of traditional optical microscopes. Super-resolution superlenses have been proposed to solve this problem by manipulating the light wave in the near field. A superlens is a kind of metamaterial-based lens that can enhance the evanescent waves generated by nano-scale objects, utilizing the surface plasmon phenomenon. The superlens allows for the imaging of nano-scale objects that would otherwise be impossible to resolve using traditional lenses. Previous research has shown that nanostructures can be imaged using superlenses, but the exact shape of the superlens must be known in advance, and an analytical calculation is needed to reconstruct the image. Localized plasmon structured illumination microscopy is an approach to achieve super-resolution by imaging the superlens-enhanced evanescent wave with illumination shifts. This study proposes a new approach utilizing a conditional generative adversarial network to obtain super-resolution images of arbitrary nano-scale patterns. To test the efficacy of this approach, finite-difference time-domain simulation was utilized to obtain superlens imaging results. The data from the simulation were then used for deep learning to develop the model. With the help of deep learning, the inverse calculation of complex sub-diffraction-limited patterns can be achieved. The super-resolution feature of the superlens based on deep learning is investigated. The findings of this study have significant implications for the field of nano-scale imaging, where the ability to resolve arbitrary nano-scale patterns will be crucial for advances in nanotechnology and materials science.

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基于深度学习的超级透镜对子衍射限制模式的超分辨率成像
超分辨率成像技术的发展彻底改变了我们研究纳米级世界的能力,因为纳米级世界中的物体通常比传统光学显微镜的衍射极限还要小。超分辨超级透镜的提出就是为了通过操纵近场光波来解决这一问题。超透镜是一种基于超材料的透镜,它可以利用表面等离子现象增强纳米级物体产生的蒸发波。超级透镜可以对纳米级物体进行成像,否则传统透镜就无法分辨这些物体。先前的研究表明,纳米结构可以利用超级透镜成像,但必须事先知道超级透镜的确切形状,而且需要进行分析计算才能重建图像。局部等离子体结构照明显微镜是一种通过照明偏移对超透镜增强的蒸发波成像来实现超分辨率的方法。本研究提出了一种新方法,利用条件生成对抗网络获取任意纳米级图案的超分辨率图像。为了测试这种方法的有效性,利用有限差分时域模拟获得了超透镜成像结果。仿真数据随后被用于深度学习,以开发模型。在深度学习的帮助下,可以实现复杂的子衍射限制模式的逆计算。研究了基于深度学习的超级透镜的超分辨率功能。这项研究的发现对纳米尺度成像领域具有重要意义,因为解析任意纳米尺度图案的能力对纳米技术和材料科学的进步至关重要。
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来源期刊
CiteScore
4.10
自引率
10.50%
发文量
115
审稿时长
3-6 weeks
期刊介绍: The International Journal of Precision Engineering and Manufacturing accepts original contributions on all aspects of precision engineering and manufacturing. The journal specific focus areas include, but are not limited to: - Precision Machining Processes - Manufacturing Systems - Robotics and Automation - Machine Tools - Design and Materials - Biomechanical Engineering - Nano/Micro Technology - Rapid Prototyping and Manufacturing - Measurements and Control Surveys and reviews will also be planned in consultation with the Editorial Board.
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