A. S. Baikin, E. O. Nasakina, A. G. Kolmakov, K. V. Sergienko, M. A. Sudarchikova, M. A. Sevostyanov
{"title":"Properties of Coatings Based on Cerium Dioxide Obtained by Magnetron Sputtering","authors":"A. S. Baikin, E. O. Nasakina, A. G. Kolmakov, K. V. Sergienko, M. A. Sudarchikova, M. A. Sevostyanov","doi":"10.1134/s2075113324700230","DOIUrl":null,"url":null,"abstract":"<p><b>Abstract</b>—The review presents the parameters of magnetron sputtering of coatings based on cerium dioxide and their relationship to the structure and key properties of coatings. The influence of the type of target, the introduction of oxygen into the sputtering medium, changes in sputtering power, bias voltage, type of substrate, and its temperature on the structure, mechanical properties, and hydrophobicity of CeO<sub>2</sub>-based coatings are considered.</p>","PeriodicalId":586,"journal":{"name":"Inorganic Materials: Applied Research","volume":null,"pages":null},"PeriodicalIF":0.5000,"publicationDate":"2024-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Inorganic Materials: Applied Research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1134/s2075113324700230","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract—The review presents the parameters of magnetron sputtering of coatings based on cerium dioxide and their relationship to the structure and key properties of coatings. The influence of the type of target, the introduction of oxygen into the sputtering medium, changes in sputtering power, bias voltage, type of substrate, and its temperature on the structure, mechanical properties, and hydrophobicity of CeO2-based coatings are considered.
期刊介绍：
Inorganic Materials: Applied Research contains translations of research articles devoted to applied aspects of inorganic materials. Best articles are selected from four Russian periodicals: Materialovedenie, Perspektivnye Materialy, Fizika i Khimiya Obrabotki Materialov, and Voprosy Materialovedeniya and translated into English. The journal reports recent achievements in materials science: physical and chemical bases of materials science; effects of synergism in composite materials; computer simulations; creation of new materials (including carbon-based materials and ceramics, semiconductors, superconductors, composite materials, polymers, materials for nuclear engineering, materials for aircraft and space engineering, materials for quantum electronics, materials for electronics and optoelectronics, materials for nuclear and thermonuclear power engineering, radiation-hardened materials, materials for use in medicine, etc.); analytical techniques; structure–property relationships; nanostructures and nanotechnologies; advanced technologies; use of hydrogen in structural materials; and economic and environmental issues. The journal also considers engineering issues of materials processing with plasma, high-gradient crystallization, laser technology, and ultrasonic technology. Currently the journal does not accept direct submissions, but submissions to one of the source journals is possible.
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