Spatial analysis of multi-frequency SAW beams excited by slanted IDTs on ZnO-SiC heterostructures

Abstract

Slanted (or fan-shaped) interdigital transducers (IDTs) with broadband response allow the selective excitation of surface acoustic waves (SAWs) with narrow beam widths and pathways controlled by the excitation frequency. Such SAW-based spatial and frequency control is important for applications in microfluidics, as well as in emerging applications in semiconductor nanostructures. In this contribution, we generate both Rayleigh and Sezawa modes with slanted IDTs on a 4H-SiC substrate coated with a piezoelectric ZnO film. We directly measure the phase wavefronts of narrow SAW beams in the 1200-1260 MHz frequency bandwidth using high-resolution (<1 μm) optical interferometry, and discuss the mechanisms that directly affect the propagation direction and phase profiles of the SAW beams. The combination of multimodal and multi-frequency SAW delay lines provides rich opportunities for SAW-based control of low-dimensional systems, such as electrons in epitaxial graphene or spin centers near the surface of the SiC substrates.