A multi-layer electro elastic drive for micro and nano robotics

Afonin Sm
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Abstract

A multi-layer electro elastic drive of robotics is used in adaptive optics of compound telescope, scanning microscopy, interferometry and nanotechnology. For micro and nano robotics a multi-layer electro elastic drive is applied. The parametric model of a multi-layer electro elastic drive is determined. Its functions and matrix deformations are founded. The parameters of the multi-layer longitudinal PZT drive are determined.
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用于微型和纳米机器人的多层电子弹性驱动器
机器人的多层电弹性驱动用于复合望远镜的自适应光学、扫描显微镜、干涉测量和纳米技术。在微型和纳米机器人技术中应用了多层电弹性驱动器。多层电弹性驱动器的参数模型已经确定。确定了其功能和矩阵变形。确定了多层纵向 PZT 驱动器的参数。
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