Wavefront sensing and optical surface measurement method based on reference light modulation

Abstract

This paper proposes a reflection-type surface coherent interferometric modulation imaging (R-CIMI) method based on reference light modulation, leveraging the interference light path generated by the reflected beam of the modulator and the target surface. Furthermore, we present a mask optimization strategy to enhance the similarity of diffraction pattern structures, as well as an automatic positioning approach based on optical field estimation. Owing to the anti-disturbance properties of coherent diffraction imaging, R-CIMI is less susceptible to environmental disturbances than conventional interference techniques. Simulations and experiments demonstrate that the proposed method is comparable to conventional interference methods in terms of measurement accuracy.