{"title":"Hardware Response Function of the Reflected Electron Detector and Contrast of the Chemical Composition of Samples in Scanning Electron Microscopy","authors":"E. I. Rau, S. V. Zaitsev","doi":"10.1134/S0020441224701082","DOIUrl":null,"url":null,"abstract":"<p>Formulas are given for calculating the coefficient of backscattered electrons depending on the material (atomic number <i>Z</i>), i.e., the chemical composition of a sample, and the energy <i>E</i><sub><i>B</i></sub> of the primary irradiating electrons. The calculation of the detectable signal of reflected electrons is given depending on <i>Z</i>, <i>E</i><sub><i>B</i></sub>, and the response function <i>F</i> of semiconductor detectors and detectors based on microchannel plates (MCPs). The calculation results are compared with the experimentally measured ones. A comparative analysis of the contrast of images of the composition of samples obtained for different types of detectors at different <i>E</i><sub><i>B</i></sub> is performed. The results of the research are intended to serve practical users and experimenters in scanning electron microscopy.</p>","PeriodicalId":587,"journal":{"name":"Instruments and Experimental Techniques","volume":"67 4","pages":"755 - 760"},"PeriodicalIF":0.4000,"publicationDate":"2024-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Instruments and Experimental Techniques","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1134/S0020441224701082","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Formulas are given for calculating the coefficient of backscattered electrons depending on the material (atomic number Z), i.e., the chemical composition of a sample, and the energy EB of the primary irradiating electrons. The calculation of the detectable signal of reflected electrons is given depending on Z, EB, and the response function F of semiconductor detectors and detectors based on microchannel plates (MCPs). The calculation results are compared with the experimentally measured ones. A comparative analysis of the contrast of images of the composition of samples obtained for different types of detectors at different EB is performed. The results of the research are intended to serve practical users and experimenters in scanning electron microscopy.
期刊介绍：
Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.
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