Investigation of fundamental photonic devices and effect of post-cleaning using potassium hydroxide on lithium niobate chip

Abstract

This study demonstrates the fabrication and optical characterization of lithium niobate photonic devices including waveguides, beam splitters, and microring resonators on a thin-film lithium niobate platform. Through precise fabrication techniques and KOH post-cleaning following Ar-based etching, we achieved effective optical performance across key parameters such as transmission loss, splitting ratios, and Q-factors. These results show the potential of lithium niobate in advanced photonic applications, paving the way for its use in integrated on-chip photonics.