Use of LaB6 Segments in Magnetron Sputtering of a MoSi2–MoB–ZrB2 Heterophase Target

Abstract

The technology of lanthanum doping of oxidation-resistant Mo–Zr–Si–B coatings has been developed by using a 95% (90% MoSi₂ + 10% MoB) + 5% ZrB₂ target with LaB₆ segments for magnetron sputtering. A change in the current–voltage characteristic has been determined when using additional segments. It has been found that the use of LaB₆ leads to a decrease in the breakdown voltage of the glow discharge. Mo–Zr–Si–B and Mo–La–Zr–Si–B coatings with a uniform distribution of elements through the thickness, low roughness, and a low-defect structure have been obtained by magnetron sputtering. The use of LaB₆ segments during sputtering leads to amorphization of coatings and increased oxidation resistance under annealing in air at 1500°С.