Design and realization of 3D printed fiber-tip microcantilever beam probes applied to hydrogen sensing

Abstract

Cantilevers in microelectromechanical systems have the advantages of non-labeling, real-time detection, positioning, and specificity. Rectangular solid, rectangular hollow, and triangular microcantilevers were fabricated on an optical fiber tip via two-photon polymerization. The mechanical properties were characterized using finite element simulations. Coating the microcantilever with a palladium film enabled high sensitivity and rapid hydrogen detection. The shape of the cantilever determines the sensitivity, whereas the thickness of the palladium film determines the response time. Additional microelectromechanical systems can be realized via polymerization combined with optical fibers.