{"title":"Silicon Slot Waveguide Mach-Zehnder Using Fixed Electron Beam Moving Stage Patterning Technique","authors":"V. Mere, S. Selvaraja","doi":"10.1109/icee44586.2018.8937940","DOIUrl":null,"url":null,"abstract":"We demonstrate a fixed electron beam (e-beam) moving stage patterned photonics integrated circuit on Silicon-on-insulator platform. The circuit demonstrator consists of power splitter/combiner, wire-to-slot couplers, bend waveguide, and wire waveguides. We present a slot Mach-Zehnder interferometer (MZI) in 1550 nm band with efficient slot mode excitation. We verify slot mode excitation using numerical calculation.","PeriodicalId":6590,"journal":{"name":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","volume":"82 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/icee44586.2018.8937940","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrate a fixed electron beam (e-beam) moving stage patterned photonics integrated circuit on Silicon-on-insulator platform. The circuit demonstrator consists of power splitter/combiner, wire-to-slot couplers, bend waveguide, and wire waveguides. We present a slot Mach-Zehnder interferometer (MZI) in 1550 nm band with efficient slot mode excitation. We verify slot mode excitation using numerical calculation.
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