Protective insulating films and methods for their preparation

T. Patrusheva, V. A. Fedyaev, N. Y. Snezhko, Ludmila E. Karelina
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Abstract

This article describes the materials and methods of applying protective dielectric coatings, namely polymer and oxide coatings. The results of investigations of oxide coatings ZrO 2 , and TiO 2 , obtained by extraction-pyrolytic method.
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保护绝缘薄膜及其制备方法
本文介绍了保护介质涂层的材料和应用方法,即聚合物和氧化物涂层。采用萃取-热解法制备了氧化膜zro2和tio2。
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