Silicon Nitride assisted SU8 Grating for Polymer Waveguide Coupling

Abhai Kumar, S. Nambiar, Rakshitha Kallega, P. Ranganath, S. Selvaraja
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Abstract

A Silicon Nitride assisted SU8 hybrid grating coupler is proposed as a means for coupling to single mode polymer waveguides. Using direct writing approach a patch grating coupler efficiency of -3.9 dB is experimentally demonstrated.
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用于聚合物波导耦合的氮化硅辅助SU8光栅
提出了一种氮化硅辅助的SU8混合光栅耦合器,用于单模聚合物波导的耦合。采用直接写入方法,实验证明了贴片光栅耦合器的效率为-3.9 dB。
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