IBC - ION BEAM CENTER

Abstract

In the Ion Beam Center (IBC), various set-ups – electrostatic accelerators, ion implanters, plasma-based ion implantation equipment, low-energy ion tools, an ion microscope etc. – are combined into a unique facility for research and applications using ion beams. Almost all ions from stable chemical nuclides are available in the ion energy range from 10 eV to about 60 MeV. In addition to broad beams, also focused (down to 1 nm) and highly-charged (charge state up to 45 + ) ion beams, or ions extracted from a plasma can be provided. In total, the IBC operates more than 30 dedicated tools or beamline end-stations. The specific expertise of IBC is the modification and analysis of solids by energetic ions aimed to develop novel materials for information technology, electronics or energy systems. In addition, ion beam analysis techniques became of increasing importance for interdisciplinary fields like geochemistry, climate or environmental research and resources technology. Special add-on services offered ensure a successful realization of user experiments. Based on a long-term expertise, specific equipment and common commercial procedures, the IBC is strongly active in the use of ion beam techniques for industrial applications aimed to initiate valuable product innovation.