R. Anzalone, M. Camarda, A. Auditore, N. Piluso, A. Severino, A. Magna, G. D'Arrigo, F. Via
{"title":"Wafer Cut Effect on Hetero-Epitaxial 3C-SiC Film for MEMS Application","authors":"R. Anzalone, M. Camarda, A. Auditore, N. Piluso, A. Severino, A. Magna, G. D'Arrigo, F. Via","doi":"10.1149/2.015206ESL","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11627,"journal":{"name":"Electrochemical and Solid State Letters","volume":"21 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2012-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electrochemical and Solid State Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1149/2.015206ESL","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}