Expert system of single magnetic lens using JESS in Focused Ion Beam

Fadhil A. Ali
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引用次数: 1

Abstract

This work shows expert system of symmetrical single magnetic lens used in focused ion beam optical system. Java expert system shell(JESS) programming is proposed to build the intelligent agent "MOPTION"for getting an optimum magnetic flux density , and calculate the ion optical trajectory. The combination of such rule based engine and SIMION 8.1 has configured the reconstruction process and compiled the data retrieved by the proposed expert system agent to implement the pole-pieces reconstruction for lens design. The pole pieces reconstruction has been resulted in 3D graph , and under the infinite magnification conditions of the optical path, aberration (spherical / chromatic and total) disks diameters have been obtained and got the values (0.03,0.13 and 0.133) micron (µm) respectively.
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聚焦离子束的单磁透镜专家系统
本文介绍了用于聚焦离子束光学系统的对称单磁透镜专家系统。采用Java专家系统外壳(JESS)编程,构建智能体“MOPTION”以获得最佳磁通密度,并计算离子光学轨迹。该基于规则的引擎与SIMION 8.1相结合,配置了重构过程,并对所提出的专家系统代理检索到的数据进行了编译,实现了透镜设计的极片重构。在无限放大的光路条件下,得到了像差(球/色和总)圆盘直径,分别为0.03、0.13和0.133微米(µm)。
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International Journal of Computer Science and Applications
International Journal of Computer Science and Applications Computer Science-Computer Science Applications
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期刊介绍: IJCSA is an international forum for scientists and engineers involved in computer science and its applications to publish high quality and refereed papers. Papers reporting original research and innovative applications from all parts of the world are welcome. Papers for publication in the IJCSA are selected through rigorous peer review to ensure originality, timeliness, relevance, and readability.
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