掺硼锗纳米晶体薄膜的电子特性。

0 MATERIALS SCIENCE, MULTIDISCIPLINARY Discover nano Pub Date : 2023-09-07 DOI:10.1186/s11671-023-03893-7
Dan Shan, Menglong Wang, Daoyuan Sun, Yunqing Cao
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引用次数: 1

摘要

采用等离子体增强化学气相沉积(PECVD)技术制备了不同掺杂浓度的硼(B)掺杂锗纳米晶体(Ge NC)薄膜,并进行了热处理。研究了掺杂b的Ge NCs薄膜的电子特性和微观结构表征。值得一提的是,掺杂B后,Ge NCs薄膜的霍尔迁移率[公式:见文]得到了增强,达到最大值200 cm2 V-1,这可能是由于掺杂B后薄膜表面缺陷态的减少。同样重要的是要强调的是,在B掺杂前后,Ge NCs薄膜的温度依赖迁移率[公式:见文]表现出不同的温度依赖趋势。全面研究了b掺杂Ge NC薄膜中不同的载流子输运特性,并对输运过程中的散射机制进行了详细的讨论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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The electronic properties of boron-doped germanium nanocrystals films.

Various doping concentrations of boron (B)-doped germanium nanocrystal (Ge NC) films were prepared using the plasma-enhanced chemical vapor deposition (PECVD) technique followed by thermal annealing treatment. The electronic properties of B-doped Ge NCs films combined with the microstructural characterization were investigated. It is worthwhile mentioning that the Hall mobilities [Formula: see text] of Ge NCs films were enhanced after B doping and reached to the maximum of 200 cm2 V-1, which could be ascribed to the reduction in surface defects states in the B-doped films. It is also important to highlight that the temperature-dependent mobilities [Formula: see text] exhibited different temperature dependence trends in the Ge NCs films before and after B doping. A comprehensive investigation was conducted to examine the distinct carrier transport properties in B-doped Ge NC films, and a detailed discussion was presented, focusing on the scattering mechanisms involved in the transport process.

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