高功率波导集成分布式吸收光电二极管

H. Jiang, P. Yu
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引用次数: 12

摘要

提出了一种利用指数匹配层实现垂直耦合、1.3 /spl μ m波长波导集成InGaAs分布式吸收光电二极管的新方法,该方法可以提高光饱和功率、响应性和带宽。采用本设计制作的波导光电二极管在20 GHz连续波光功率下显示出高达10.2 mA的RF 1 db压缩点。此外,该器件具有47 GHz的3db带宽,在无增透涂层的情况下,在20 GHz时具有0.4 a /W的微波响应率。
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High-power waveguide integrated photodiode with distributed absorption
A novel implementation of a vertically coupled, 1.3 /spl mu/m wavelength waveguide integrated InGaAs photodiode with distributed absorption is proposed using an index matching layer that can improve optical saturation power, responsivity and bandwidth. Waveguide photodiode made with this design shows a RF 1-dB compression point up to 10.2 mA at 20 GHz with CW optical power. Furthermore, the device has a 47 GHz 3-dB bandwidth, and 0.4 A/W microwave responsivity at 20 GHz without anti-reflection coating.
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