D. Burda, Mohammad M. Allaham, M. Horáček, A. Knápek
{"title":"介质纳米层及多层涂层发射体的研究","authors":"D. Burda, Mohammad M. Allaham, M. Horáček, A. Knápek","doi":"10.1109/IVNC57695.2023.10188949","DOIUrl":null,"url":null,"abstract":"We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3, HfO2, which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study of Dielectric Nanolayers and Multilayer Coated Emitters\",\"authors\":\"D. Burda, Mohammad M. Allaham, M. Horáček, A. Knápek\",\"doi\":\"10.1109/IVNC57695.2023.10188949\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3, HfO2, which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.\",\"PeriodicalId\":346266,\"journal\":{\"name\":\"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)\",\"volume\":\"60 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVNC57695.2023.10188949\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC57695.2023.10188949","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study of Dielectric Nanolayers and Multilayer Coated Emitters
We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3, HfO2, which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.
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