透明基板上的高填充系数压电微机械超声换能器

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-06-01 DOI:10.1109/TRANSDUCERS.2017.7994233

G. Luo, S. Fung, Qi Wang, Y. Kusano, Jon Lasiter, D. Kidwell, D. Horsley

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引用次数: 17

摘要

本研究提出了一种高填充因子氮化铝(AlN)压电微机械超声换能器(PMUTs)阵列。制备了直径在40微米到100微米之间的pmut，在空气中产生3 MHz到18 MHz的谐振频率。充填系数高达62%。在2.5 MHz频率下进行浸没式脉冲回波实验。

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High fill factor piezoelectric micromachined ultrasonic transducers on transparent substrates

This study presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) fabricated on a transparent substrate. PMUTs with diameters ranging from 40 microns to 100 microns were fabricated, resulting in resonant frequencies from 3 MHz to 18 MHz in air. A high fill factor of 62% was achieved. Immersed pulse-echo experiments were conducted at 2.5 MHz.

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2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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