激光二极管微加工中的实时热控制

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference Pub Date : 2006-05-22 DOI:10.1109/CLEO.2006.4628847

M. Galiazzo, M. Marcato, A. Dalla Lana, P. Villoresi

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引用次数: 0

摘要

利用非球面光学技术，利用高空间分辨率的PbSe传感器进行红外实时测温，实现了对温度敏感材料微加工的控制。在370 K到800 K范围内的应用已经讨论。

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Real-time thermal control in laser diode microprocessing

The infrared real-time temperature measure by a PbSe sensor with high spatial resolution via aspheric optics has been exploited to control temperature-sensitive material microprocessing. Applications in the range from 370 K to 800 K has been discussed.

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2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference

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