{"title":"宽带频率粘度测量使用低TCF剪切模式谐振器组成的c轴倾斜尺度薄膜在厚切割石英板","authors":"Y. Yamakawa, K. Sano, R. Karasawa, T. Yanagitani","doi":"10.1109/TRANSDUCERS.2017.7994497","DOIUrl":null,"url":null,"abstract":"In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2017-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate\",\"authors\":\"Y. Yamakawa, K. Sano, R. Karasawa, T. Yanagitani\",\"doi\":\"10.1109/TRANSDUCERS.2017.7994497\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.\",\"PeriodicalId\":174774,\"journal\":{\"name\":\"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-07-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2017.7994497\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2017.7994497","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate
In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.
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