利用对称梳状驱动器与强带电驻极体耦合的宽带振动能量收集器

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI:10.1109/DTIP.2017.7984480

H. Mitsuya, H. Ashizawa, D. Anai, G. Hashiguchi, H. Homma, H. Fujita, H. Toshiyoshi

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引用次数: 0

摘要

我们开发了一种宽带振动能量收集器，利用对称梳状驱动电极，该电极涂有由掺钾热氧化硅薄膜制成的固体离子驻极体。该装置密封在真空封装中，用于高能量转换，以消除机械损失。有了这个装置，我们可以捕捉任何频率的振动以及用于发电的脉冲运动。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A broad-band vibrational energy harvester utilizing symmetrical comb-drives coupled with strong charged electret

We have developed a broad-band vibrational energy harvester by utilizing symmetrical comb-drive electrodes that were coated with solid-ion electrets made of potassium-doped thermal silicon oxide film. The device was sealed in a vacuum package for high energy conversion to eliminate mechanical losses. With this device, we capture vibrations of any frequency as well as of impulse motions for power generation.

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来源期刊

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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